JAPAN MEMS provides MEMS foundry service with Japanese MEMS foundry service companies.

We provide Japanese and Asian MEMS foundry service.

Japan MEMS provides MEMS foundry service with Japanese MEMS foundry service companies and Asian MEMS foundry service companies as well We have a net work of MEMS foundry services in Japan and Asia.

Quotation

We provide a quotation based on your requirement.　Contact Us

1. Photo process

5X Stepper：
　0.8 μm resolution、overlay control < 0.2 μm
- 1X Mask Aligner: ：
　3 μm resolution for single side exposure
- Both side Aligner
　1 μm overlay control for single side alignment
　2 μm overlay control for double side alignment
- Track coating system
- Track developing system
- Coating and developing system：Double side coating and developing

2. Deposition

- Sputtering:： Al, Ta, TaN, Ta2O5, Ti, TiN, Cu, TaAl, AlCuSi, AlCu
- E-Gun Deposition：Cr, Au, Pt
- PECVD, APCVD：SiC; SiN; SiO2; BPSG
- Furnace：SiN; SiO2; Poly; Doped Poly

3. Dry etching

- Deep Si Etcher (ICP Etcher)
- Metal Etcher
- Poly Si Etcher
- Oxide/SiNx Etcher
- Plasma Asher

4. Bulk MEMS related : Bulk fabrication

- Both side aligner (2 μm overlay accuracy)
- ICP Si deep etching system
- Si wet etching
　KOH (time-mode or auto etch-stop by electro-chemical or P+)
- Through wafer interconnection module
- Wet clean bench for KOH, PHF, DHF

5. Wafer bonding

-Any kind of bonding such as Si/Si, Si/SiO2 is possible
-Up to 4mm thick sample

6. Evaluation

- In-line CD SEM
- Alpha-Step Profiler
- Membrane Thickness Measurement
- Surfscan
- Defect Reviewer
- FTIR
- Al Thickness Measurement
- Four Point Probe
- Wafer Stress Analyzer
- Therma-Wave Implant Damage Analyzer
- Nanometrics Dielectric Thickness Measurement
- SPV Furnace Impurity Analyzer
- Rudolph Ellipsometer
- Semiconductor CV Plotter
- Top-side Microscope
- Double-side Microscope
- Cross-sectional SEM